High-Tc SQUIDs on Silicon Substrates
نویسندگان
چکیده
We have developed high-?;. SQUIDs based on Josephson step-edge junctions on silicon substrates. The SQUIDs show a transfer function up to 150 pVIQ,, and a white noise of lV5 @JHz" at 50 K. During the last three years extensive investigations of the growth of YBCO, buffer and passivation layers as well as step-preparation and patterning processes were necessary to find a standard preparation process comparable to the preparation of Josephson step-edge junctions on classical substrates. In this paper we give an overview on the technical solutions based on the laser deposition of YBCO I buffer multilayer systems and we discuss Josephson junction and SQUID properties depending on different device preparation processes.
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